Five inch reticle cassette
Discontinued part No. 41170-00

41170-00 was our first five inch reticle cassette
developed for use on ASML steppers.

It was designed to be clipped to a standard
plastic ASYST SMIF pod door.

However, poor dimensional stability of the SMIF
pod door and its liner led to many problems of
reticle damage and handler crashes.

This led to replacement of the clip-on cassette
with our integrated five inch cassette 51170-00.

It has now been replaced by 99500-00.