Canon single reticle pod
Part No. 99300-00

Our Canon single reticle SMIF pod features construction methods, materials and optimised support structures that are based on our well proven multi reticle cassettes.

The advantages of 99300-00 for protection of the reticle against electric field induced damage are identical to those described on the 99100-00 information page.

In addition, this pod features special supports that were developed in collaboration with Canon and are optimised for use on Canon litho equipment.

This support design avoids contact with sensitive areas on the reticle that are contacted in a SEMI Standard pod.

For further details, please contact us.