Canon multi reticle cassette
Part No. 99400-00

Microtome has worked in close collaboration with Canon to develop a special cassette for them.

99400-00 is based on the SEMI Standard design but the reticle support structure is changed slightly to optimise the performance on some Canon litho tools.

The reticle support points are repositioned to avoid sensitive areas on some Canon reticles that are contacted in a SEMI Standard reticle pod/cassette. This helps to avoid overlay errors and reduces the need to clean the reticle, pod and the chuck in the litho tool.

For advice about whether you should use the SEMI Standard cassette type 99600-00 or the Canon optimised cassette type 99400-00 on your litho tools, please contact Canon directly.