Microtome is pleased to announce that in close collaboration with Entegris, we are now offering the world's first purgeable multi-reticle SMIF pod system, which is available in two formats:
The 99600-00P2 variant of our SEMI E112 cassette has two purge valves fitted that allow the cassette to couple with the Entegris Clarilite™ XCDA delivery system for continuous pod purging during storage.
In the 99600-00P3 version, the base of the cassette is fitted with an Entegris Clarilite™ chemical purification cartridge insert that serves to continuously remove airborne contaminants from the inside of the pod.
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