Products
Microtome's objective has always been to offer the most protective reticle handling environment possible, so we operate a program of continuous product improvement that is driven by our own research, feedback from our customers and liaison with equipment makers.

Recently we conducted some pioneering research into reticle electrostatic damage in conjunction with the University of Colorado in Colorado Springs. This research has strengthened our view that there is a widespread need for much better electrostatic protection of reticles and supports the development of our metal reticle SMIF pod for complete electric field shielding of the reticle.

Since the findings from our research also have important implications for reticle protection outside the reticle pod, we now offer a reticle electrostatic protection consultancy service to help our customers improve their understanding of the problem and address it in an appropriate way (and it is important to realise that some conventional ESD protection methods and existing designs for reticle handling actually increase the risk of field induced damage!)

Over the years our product range has expanded to include all the products featured here, plus a few that are not shown. The currently available product range is shown at the top of the list, but the discontinued products shown at the bottom may still be supportable in the field through our R&R™ service - enquire for details.

Our "SEMI Standard" products do not simply comply with the SEMI Standards – most importantly they meet the more stringent requirements of the litho tool manufacturers themselves and have been tested and approved by them.

So whatever your reticle handling requirement may be, we are confident that we can supply the best solution. If you do not see the product you think you need listed in these pages, please enquire. We will be happy to help you meet your objective.
Electrostatic Protection Consultancy Service

To prevent this - from educational seminars to fab-wide risk assessment of reticle handling procedures.
99100-00 E-Pod

SEMI Standard E111 single reticle SMIF pod with patented Faraday Cage construction for electric field shielding
99300-00 E-Pod

Canon optimised single reticle SMIF pod with patented
Faraday Cage construction for electric field shielding
99600-00

SEMI Standard E112 multi reticle cassette
New! 99600-00P

Purgeable SEMI Standard E112 multi reticle cassette
99500-00

Five inch cassette with integral metal SMIF base
for improved dimensional rigidity and reticle handling security
99400-00

Canon optimised six inch multi reticle cassette
21321-00

SEMI Standard E112 multi reticle pod
fitted with E47.1 automation flange
21320-00

SEMI Standard E112 multi reticle pod
fitted with standard manual handle
          Discontinued products
99747-00

Canon optimised multi reticle cassette
87620-00

Six inch multi reticle cassette with integral SMIF base
67920-00

Six inch clip-on multi reticle cassette
51170-00

Five inch multi reticle cassette with metal SMIF base
41170-00

Five inch clip-on multi reticle cassette