RETICLE Handling – OUR ASSURANCE OF COMPATIBILITY
With over 30 years of experience in SMIF-based reticle handling, we have addressed and resolved almost all the equipment compatibility issues that have been encountered with the SMIF-based system of reticle handling, which was initially developed by ASML. As the primary development and prototyping partner for the SEMI Standards Task Force after SMIF became the chosen system, we were instrumental in finding mutually compatible cassette dimensions to suit all the major lithography suppliers. Since then, thanks to the flexibility of our design and manufacturing approach, we have continued to help resolve compatibility issues with various pieces of reticle handling equipment.
COMPATIBILITY ASSURANCE BEYOND THE SEMI STANDARDS
The SEMI Standards define a basic set of dimensional requirements for reticle pods and cassettes that should ensure compatibility with equipment that has been designed to the same Standard. However, in practice there can be, and often are, small deviations from the SEMI specifications in some reticle handling equipment that can cause compatibility problems. We have years of experience of dealing with these kinds of issues and have been able to resolve many of them in consultation with our customers, thanks to the adaptability of our design and manufacturing method.
Proactive Engineering Solutions for Compatibility
Our team of experienced engineers at Microtome takes a proactive approach to pod and cassette development, identifying and addressing potential compatibility issues before they arise. With our extensive knowledge of common compatibility issues in reticle handling, we are well-equipped to provide custom solutions that will work seamlessly with any toolset.
R&R™ Service for Upgrades and Reconditioning
In the event that new compatibility issues arise, our R&R™ service allows us to upgrade and recondition existing units to ensure their continued satisfactory operation in your fab. This service not only extends the lifespan of your equipment but also ensures that it remains compatible with any changes or upgrades that may occur in the future.
Custom Solutions for Your Specific Needs
At Microtome, we understand that every fab is unique and may have specific requirements when it comes to reticle carriers. That’s why we offer custom solutions that are tailored to meet your individual needs. Whether you require a specialized reticle cassette for a specific toolset or a custom pod design, we can work with you to provide a solution that meets your exact specifications.
Reticle Cassettes for Maximum Protection
Our reticle cassettes are designed to provide maximum protection for your valuable reticles, ensuring that they remain safe and secure during handling and storage. The all-metal casing provides effective shielding from electric fields, while also guaranteeing the necessary dimensional rigidity for safe reticle handling by robotic systems. There are no metal parts that can be contacted by the reticles, minimizing the risk of reticle chipping and scratching.
Guaranteed Compatibility with Microtome
When you choose Microtome for your reticle carrier needs, compatibility is virtually guaranteed. Our years of experience in SMIF-based reticle carrier design, combined with our proactive engineering solutions and custom design capabilities, ensure that our products will work seamlessly with your existing equipment. Trust Microtome for all your reticle carrier needs and experience the difference that our expertise and commitment to quality can make in your fab.
Contact Us Today!
So why wait? Contact us today to learn more about our reticle cassettes, pods, and compatibility solutions, and let Microtome be your partner in achieving optimal performance and protection for your valuable reticles.