Reticle Carrier Products
Microtome is the leading provider of high-quality reticle carrier products. Our goal is to offer the most protective reticle carrier environment possible through continuous product improvement driven by our research, customer feedback, and collaboration with equipment manufacturers.
Innovative Research and Development
At Microtome, we are constantly pushing the boundaries in reticle handling technology. We conducted our own groundbreaking research into reticle electrostatic damage, in partnership with the University of Colorado in Colorado Springs, proving and quantifying the need for better electrostatic protection of reticles. This research led directly to the publication of new reticle handling guidance in the SEMI Standards and the ITRS (now IRDS). To address the stricter requirements, we developed our all-metal single reticle pod, which completely shields the reticle from external electric fields. Then, to further enhance the value of the new SMIF pod, we developed a unique reticle clamping system that supports the reticle by contact only with the beveled edge, as in a transportation handling. This allows the SMIF pod to be used to transport the reticle from the mask house to the fab in complete security, while eliminating the need to transfer the reticle from a transport handling into a SMIF pod upon receipt at the fab.
Reticle Electrostatic Protection Consultancy Service
Our research has proven that the standard ESD prevention methods used in semiconductor manufacturing can potentially increase the electrostatic risk to reticles rather than reducing it. Some of the most misunderstood aspects are the use of air ionization, equipotential bonding (grounding) and static dissipative or even “conductive” plastics. All of these have the capability, if used inappropriately, to allow – and in some cases increase – reticle electrostatic damage.
Contact us today to learn more about how we can help you to improve your reticle electrostatic security.
Expansive Product Range
Over more than 35 years of specializing in reticle handling, our product range has grown to include a variety of reticle cassettes and pods with several configuration options. Currently we manufacture SEMI Standard compliant products, plus some customized designs developed for individual customers. We also continue to offer support for discontinued products, through our R&R™ service, for as long as parts are available to service them. So, whether you are seeking to prolong the use of your heritage reticle pod stock or invest in the most protective reticle pods you can buy for a new facility, we can help you. Simply complete our online enquiry form and we will advise you of the products that are most suitable for your application.
Custom Solutions and Support
While SEMI Standards specifications go a long way towards ensuring functionality and compatibility, there can be occasions when a standard product isn’t quite right. Maybe your application demands something better than average, or you have a unique application that was not foreseen when the SEMI Standards were written? This is where Microtome can help. Our engineering approach, whereby we machine all our parts rather than molding them, means that we have great flexibility to adapt our designs. So, a custom-developed solution for your application may be more readily available and affordable than you might think. If you wish to take your reticle handling to the next level or have our reticle handling products adapted to a suit a new application, please send us the details via our online form and we will endeavor to provide you with a solution.
Reticle Cassettes
Our reticle cassettes are designed to provide maximum protection for your valuable reticles. The all-metal cassette body provides electrostatic shielding, as well as the dimensional stability that is essential to meet the requirements of the lithography system manufacturers, which can be more stringent than the SEMI Standard specifications. Our API (all plastic interface) design ensures that the reticles can only contact soft plastic, not metal, helping to avoid scratching and chipping. Purgeable versions are also available to reduce the risk of haze. Our current designs have been field-proven for many years and form a stable foundation for any custom developments.
Reticle Pods
The reticle pod is the shell that encloses the reticle cassette to exclude contamination and to allow the reticles to be handled safely in a standard factory environment. Pods can have manual handles fitted, or SEMI Standard automation flanges that allow transportation via an overhead conveyor. Optional side flanges are also available, to allow robotic handling in some pod stockers and similar equipment. Our all-metal single reticle pod has an integral “cassette” structure, featuring insulating plastic support rails and a patented reticle clamping mechanism, which lifts the reticle off the support rails and clamps it securely by contacting only the beveled edges, as in a normal shipping box.
Our Products
Electrostatic Protection Consultancy Service
To prevent this – from educational seminars to fab-wide risk assessment of reticle carrier procedures.
99100-00 E-Pod™
SEMI Standard E111 single reticle SMIF pod with patented Faraday Cage construction for electric field shielding and unique reticle clamping system.
99600-00
SEMI Standard E112 multi reticle cassette
99600-00P
Purgeable SEMI Standard E112 multi reticle cassette
99500-00
Five inch cassette with integral metal SMIF base for improved dimensional rigidity and reticle carrier security
99400-00
Canon optimized six inch multi reticle cassette
21321-00F
SEMI Standard E112 multi reticle pod fitted with E47.1 automation flange
21320-00
SEMI Standard E112 multi reticle pod fitted with standard manual handle
Contact Us Today!
Microtome is the ideal partner to satisfy all your reticle pod requirements. With a commitment to innovation, quality, and customer satisfaction, we strive to provide cutting-edge solutions that meet and exceed industry standards. Contact us today to learn more about our standard products, or to find out how we can customize a solution for your specific needs.